Mks Astron 2l Manual __hot__

), the system avoids sputtering the source's own chamber walls, ensuring the radicals delivered are "extremely clean".

The manual specifies: Degas only when pressure is below 1 x 10⁻⁵ Torr. Degassing at higher pressures will cause arcing and permanent damage. One 5-minute degas per week is sufficient for clean systems. mks astron 2l manual